61. Micromachining and Microfabrication Process Technology V: 20-22 September 1999 Santa Clara, California EUR 99,13
	62. 2000 IEEE Micro Electro Mechanical Systems
	63. 1996 Conference on Optoelectronic and Microeletronic Materials and Devices: Proceedings, 8-11 December 1996, Australian National University, Canberra, Australia
	64. Microelectromechanical Systems (MEMS) 1997: International Mechanical Engineering Congress and Exposition, Dallas, Texas, November 16-21, 1997 (DSC)
	65. University/Government/Industry Microelectronics Symposium, 1999 13th Biennial: IEEE Electron Devices Society, Sponsor(S
	66. 1992 IEEE Multi-Chip Module Conference McMc-92, Proceedings, March 18-20, 1992, Santa Cruz, California
	67. 1997 IEEE International Reliability Physics Symposium EUR 222,37
	68. 1996 9th International Vacuum Microelectronics Conference (Ivmc
	69. 1998 IEEE 11th International Workshop on Microelectromechanical Systems
	70. Microelectromechanical Systems (Mems): Microscale Thermal Phenomena in Electronic Systems, Applications of Miocrofabrication to Fluid Mechanics, Mechanics in Micro-Electro-Mechanical

1 ... . 4 . 5 . 6 . 7 . 8 . 9 . 10 . ... 45